Authors

Foubert, Philippe; Vaglio Pret, Alessandro; Altamirano Sanchez, Efrain; Gronheid, Roel

ISSN

1537-1646

Issue

3

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

10

Title

Impact of post-litho linewidth roughness smoothing processes on the post-etch patterning result

Publication type

Journal article