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Superior NBTI reliability of SiGe channel pMOSFETs: replacement Gate, FinFETs, and impact of body bias
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Authors
Franco, Jacopo
;
Kaczer, Ben
;
Eneman, Geert
;
Roussel, Philippe
;
Grasser, T.
;
Mitard, Jerome
;
Ragnarsson, Lars-Ake
;
Cho, Moon Ju
;
Witters, Liesbeth
;
Chiarella, Thomas
;
Togo, Mitsuhiro
;
Wang, Wei-E
;
Hikavyy, Andriy
;
Loo, Roger
;
Horiguchi, Naoto
;
Groeseneken, Guido
Conference
IEEE International Electron Devices Meeting - IEDM
Title
Superior NBTI reliability of SiGe channel pMOSFETs: replacement Gate, FinFETs, and impact of body bias
Publication type
Proceedings paper
Embargo date
9999-12-31
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