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BJT effect analysis in p- and n-SOI MuGFETs with high-k gate dielectrics and TiN metal gate electrode for a 1T-DRAM application
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Authors
Galeti, M.
;
Rodrigues, M.
;
Martino, J.A.
;
Collaert, Nadine
;
Simoen, Eddy
;
Aoulaiche, Marc
;
Jurczak, Gosia
;
Claeys, Cor
Conference
37th IEEE International SOI Conference
Title
BJT effect analysis in p- and n-SOI MuGFETs with high-k gate dielectrics and TiN metal gate electrode for a 1T-DRAM application
Publication type
Proceedings paper
Embargo date
9999-12-31
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