Authors

Grillaert, Joost; Meynen, Herman; Waeterloos, Joost; Coenegrachts, Bart; Van den hove, Luc

Conference

Advanced Metallization and Interconnect Systems for ULSI Applications in 1996

Title

Minimizing within die non uniformity in CMP by optimising polishing parameters and consumables

Publication type

Proceedings paper

Embargo date

9999-12-31