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Evidence of printing blank-related defects on EUV masks missed by blank inspection
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Authors
Jonckheere, Rik
;
Van Den Heuvel, Dieter
;
Hendrickx, Eric
;
Ronse, Kurt
;
Bret, Tristan
;
Hofmann, Thorsten
;
Magana, John
;
Aharonson, Israel
;
Meshulach, Doron
Conference
27th European Mask and Lithography Conference - EMLC
Title
Evidence of printing blank-related defects on EUV masks missed by blank inspection
Publication type
Proceedings paper
Embargo date
9999-12-31
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