Publication:

Aqueous photoresist and BARC wet strip in BEOL MHM patterning using UV and ozonated chemistry

Date

2011
Meeting abstract
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Author(s)

Kesters, Els  
;
Vereecke, Guy  
;
Lux, Marcel  
;
Pittevils, Joris
;
Struyf, Herbert  

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Abstract

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1960 since deposited on 2021-10-19
Acq. date: 2026-03-17

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1960 since deposited on 2021-10-19
Acq. date: 2026-03-17

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