Authors

Kesters, Els; Vereecke, Guy; Lux, Marcel; Pittevils, Joris; Struyf, Herbert

Conference

4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM

Title

Aqueous photoresist and BARC wet strip in BEOL MHM patterning using UV and ozonated chemistry

Publication type

Meeting abstract