Publication:
Chain scission resists for extreme ultraviolet lithography based on high performance polysulfone-containing polymers
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1982 since deposited on 2021-10-19
4last month
Acq. date: 2026-09-21
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Statistics
Views
1982 since deposited on 2021-10-19
4last month
Acq. date: 2026-09-21
Citations