Authors

Lawrie, Kirsten J.; Blakey, Idriss; Blinco, James P.; Cheng, Han Hao; Gronheid, Roel; Jack, Kevin S.; Pollentier, Ivan; Leeson, Michael J.; Younkin, Todd; Whittaker, Andrew K.

ISSN

0959-9428

Issue

15

Journal

Journal of Materials Chemistry

Volume

21

Title

Chain scission resists for extreme ultraviolet lithography based on high performance polysulfone-containing polymers

Publication type

Journal article

Embargo date

9999-12-31