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Smooth and high quality epitaxial strained Ge grown on siGe strain relaxed buffers with 70-80% Ge
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Authors
Loo, Roger
;
Souriau, Laurent
;
Ong, Patrick
;
Kenis, Karine
;
Rip, Jens
;
Peter, Storck
;
Buschhardt, Thomas
;
Vorderwestner, Martin
ISSN
0022-0248
Issue
1
Journal
Journal of Crystal Growth
Volume
324
Title
Smooth and high quality epitaxial strained Ge grown on siGe strain relaxed buffers with 70-80% Ge
Publication type
Journal article
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