Authors

Maestre Caro, Arantxa; Travaly, Youssef; Maes, Guido; Borghs, Gustaaf; Armini, Silvia

Conference

IEEE International Interconnect Technology Conference and Materials for Advanced Metallization - IITC/MAM

Title

Enabling Cu-Cu connection in (dual) damascene interconnects by selective deposition of two different SAM molecules

Publication type

Proceedings paper

Embargo date

9999-12-31