Publication:
Enabling Cu-Cu connection in (dual) damascene interconnects by selective deposition of two different SAM molecules
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1880 since deposited on 2021-10-19
3last month
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Acq. date: 2026-02-28
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Statistics
Views
1880 since deposited on 2021-10-19
3last month
1last week
Acq. date: 2026-02-28
Citations