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Defect density reduction of the Al2O3/GaAs(001) interface by using H2S molecular beam passivation
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Authors
Merckling, Clement
;
Chang, Y.C.
;
Lu, C.Y.
;
Penaud, J.
;
Brammertz, Guy
;
Scarrozza, Marco
;
Pourtois, Geoffrey
;
Kwo, J.
;
Hong, M.
;
Dekoster, Johan
;
Meuris, Marc
;
Heyns, Marc
;
Caymax, Matty
ISSN
0039-6028
Issue
19_20
Journal
Surface Science
Volume
605
Title
Defect density reduction of the Al2O3/GaAs(001) interface by using H2S molecular beam passivation
Publication type
Journal article
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