Publication:
Creep in MEMS. Failures in MEMS due to creep, plasticity and processing-microstructures-temperatures related mechanisms
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2004 since deposited on 2021-10-19
2last month
Acq. date: 2026-01-09
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Metrics
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2004 since deposited on 2021-10-19
2last month
Acq. date: 2026-01-09
Citations