Publication:
Galvanic corrosion of PN junctions during the dielectric removal with HF for RMG transistors
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1940 since deposited on 2021-10-19
2last month
Acq. date: 2026-08-10
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Statistics
Views
1940 since deposited on 2021-10-19
2last month
Acq. date: 2026-08-10
Citations