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Galvanic corrosion of PN junctions during the dielectric removal with HF for RMG transistors
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Authors
Pacco, Antoine
;
Sebaai, Farid
;
Suhard, Samuel
;
Struyf, Herbert
;
De Gendt, Stefan
;
Vos, Rita
;
Veloso, Anabela
;
Mertens, Paul
Conference
Semiconductor Cleaning Science and Technology 12
Title
Galvanic corrosion of PN junctions during the dielectric removal with HF for RMG transistors
Publication type
Proceedings paper
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