Publication:

Galvanic corrosion of PN junctions during the dielectric removal with HF for RMG transistors

Date

2011-10

Proceedings Paper

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Author(s)

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Struyf, Herbert

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De Gendt, Stefan

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Veloso, Anabela

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Statistics

1937 since deposited on 2021-10-19

Acq. date: 2026-02-25