Authors

Rosseel, Erik; Everaert, Jean-Luc; Hikavyy, Andriy; Witters, Liesbeth; Mitard, Jerome; Vandervorst, Wilfried

Conference

International Topical Workshop onSubsecond Thermal Processing of Advanced Materials - Subtherm

Title

Applications of dynamic surface annealing for high-performance Si and Ge based MOS devices

Publication type

Oral presentation