Publication:
Line edge roughness (LER) correlation and dielectric reliability with spacer-defined double patterning (SDDP) at 20nm half pitch
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1802 since deposited on 2021-10-19
1last month
Acq. date: 2026-02-27
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Statistics
Views
1802 since deposited on 2021-10-19
1last month
Acq. date: 2026-02-27
Citations