Atomic layer deposition of Al2O3 on S-passivated Ge

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Authors

Sioncke, Sonja; Ceuppens, Joris; Lin, Dennis; Nyns, Laura; Delabie, Annelies; Struyf, Herbert; De Gendt, Stefan; Muller, Matthias; Beckhoff, Burkhard; Caymax, Matty

ISSN

0167-9317

Issue

7

Journal

Microelectronic Engineering

Volume

88

Title

Atomic layer deposition of Al2O3 on S-passivated Ge

Publication type

Journal article

Embargo date

9999-12-31

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