Publication:

Atomic layer deposition of Al2O3 on S-passivated Ge

Date

2011
Journal article
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Author(s)

Sioncke, Sonja
;
Ceuppens, Joris  
;
Lin, Dennis  
;
Nyns, Laura  
;
Delabie, Annelies  
;
Struyf, Herbert  
;
De Gendt, Stefan  
;
Muller, Matthias
;
Beckhoff, Burkhard
;
Caymax, Matty  

Journal

Microelectronic Engineering

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1986 since deposited on 2021-10-19
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Acq. date: 2026-01-11

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