Authors

Lukyanchikova, N. B.; Petrichuk, M. V.; Garbar, N. P.; Simoen, Eddy; Claeys, C.

Conference

Proceedings 1997 International Semiconductor Device Research Symposium

Title

Physical model of GR noise observed under inversion conditions near the pSi/SiO2 interfaces in SIMOX submicron MOSFETs and its application for defect characterization

Publication type

Proceedings paper

Embargo date

9999-12-31