Publication:

Gate-last vs. gate-first technology for aggressively scaled EOT Logic/RF CMOS

Date

2011
Proceedings Paper
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Author(s)

Veloso, Anabela  
;
Ragnarsson, Lars-Ake  
;
Cho, Moon Ju
;
Devriendt, Katia  
;
Kellens, Kristof  
;
Sebaai, Farid  
;
Suhard, Samuel  
;
Brus, Stephan  
;
Crabbe, Yvo
;
Schram, Tom  
;
Rohr, Erika
;
Paraschiv, Vasile  
;
Eneman, Geert  
;
Kauerauf, Thomas
;
Dehan, Morin
;
Hong, Sug-Hun
;
Yamaguchi, Shinpei
;
Takeoka, Shinji
;
Higuchi, Yuichi
;
Tielens, Hilde  
;
Van Ammel, Annemie  
;
Favia, Paola  
;
Bender, Hugo  
;
Franquet, Alexis  
;
Conard, Thierry  
;
Li, X.
;
Pey, K.-L.
;
Struyf, Herbert  
;
Mertens, Paul  
;
Absil, Philippe  
;
Horiguchi, Naoto  
;
Hoffmann, Thomas Y.

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