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Ge chemical vapor deposition on GaAs and In0.53Ga0.47As for low resistivity ohmic III-V nMOSFETs source/drain contacts
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Authors
Vincent, Benjamin
;
Firrincieli, Andrea
;
Waldron, Niamh
;
Wang, W.-E.
;
Franquet, Alexis
;
Douhard, Bastien
;
Bender, Hugo
;
Vandervorst, Wilfried
;
Loo, Roger
;
Caymax, Matty
Conference
7th International Conference on Silicium Epitaxy and Heterostructures - ICSI
Title
Ge chemical vapor deposition on GaAs and In0.53Ga0.47As for low resistivity ohmic III-V nMOSFETs source/drain contacts
Publication type
Oral presentation
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