Authors

Waldron, Niamh; Nguyen, Duy; Lin, Dennis; Brammertz, Guy; Vincent, Benjamin; Firrincieli, Andrea; Winderickx, Gillis; Sioncke, Sonja; De Jaeger, Brice; Wang, Gang; Mitard, Jerome; Wang, Wei-E; Heyns, Marc; Caymax, Matty; Meuris, Marc; Absil, Philippe; Hoffmann, Thomas Y.

Conference

Dielectrics in Nanosystems -and- Graphene, Ge/III-V, Nanowires and Emerging Materials for Post-CMOS Applications 3

Title

Heterogeneous integration and fabrication of III-V MOS devices in a 200mm processing environment

Publication type

Proceedings paper

Embargo date

9999-12-31