Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS

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Authors

Wang, Bo; Tanaka, Shuji; Guo, Bin; Vereecke, Guy; Severi, Simone; Witvrouw, Ann; Wevers, Martine; De Wolf, Ingrid

ISSN

0026-2714

Issue

9_11

Journal

Microelectronics Reliability

Volume

51

Title

Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS

Publication type

Journal article

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