Publication:
Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS
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1946 since deposited on 2021-10-19
3last month
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Acq. date: 2026-02-24
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Statistics
Views
1946 since deposited on 2021-10-19
3last month
1last week
Acq. date: 2026-02-24
Citations