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Design of a capacitive pressure sensor with uniform thickness diaphragm based on imec's SiGe-MEMS platform
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1914 since deposited on 2021-10-20
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Acq. date: 2026-10-13
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Statistics
Views
1914 since deposited on 2021-10-20
1last month
Acq. date: 2026-10-13
Citations