Authors
Cantoro, Mirco;
Merckling, Clement;
Jiang, Sijia;
Guo, Weiming;
Waldron, Niamh;
Bender, Hugo;
Moussa, Alain;
Douhard, Bastien;
Vandervorst, Wilfried;
Heyns, Marc;
Dekoster, Johan;
Loo, Roger;
Caymax, Matty
Conference
SiGe, Ge, and Related Compunds 5: Materials, Processing, and Devices
Title
Heteroepitaxy of III-V compound semiconductors on Si for logic applications: selective area epitaxy in shallow trench isolation structures vs direct epitaxy mediated by strain relaxed buffers
Publication type
Proceedings paper
Embargo date
9999-12-31
