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Epitaxial growth of group IV and III-V alloy channel stacks on 300 mm Si substrates for sub-14 nm CMOS generations
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Authors
Caymax, Matty
Conference
Lawrence Symposium on Epitaxy
Title
Epitaxial growth of group IV and III-V alloy channel stacks on 300 mm Si substrates for sub-14 nm CMOS generations
Publication type
Oral presentation
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