Epitaxy of III-V based channels on Si and transistor integration for 12-nm node CMOS

Thumbnail
Metadata
Show full item record
Authors
Caymax, Matty; Merckling, Clement; Wang, Gang; Orzali, Tommaso; Guo, Weiming; Vandervorst, Wilfried; Dekoster, Johan; Waldron, Niamh; Thean, Aaron
Conference
24th Conference on Indium Phosphide and Related Materials - IPRM
Title
Epitaxy of III-V based channels on Si and transistor integration for 12-nm node CMOS
Publication type
Proceedings paper
Collections