Authors

Chou, H.-Y.; Afanasiev, Valeri; Thoan, N.H.; Adelmann, Christoph; Lin, Dennis; Houssa, Michel; Stesmans, Andre

Conference

E-MRS Spring Meeting Symposium M: More than Moore: Novel Materials Approaches for Functionalized Silicon Based Microelectronics

Title

Internal photoemission at interfaces of ALD TaiOx insulating layers deposited on Si, InP and In0.53Ga0.47As

Publication type

Proceedings paper

Embargo date

9999-12-31