Authors

Eyben, Pierre; Clarysse, Trudo; Mody, Jay; Nazir, Aftab; Schulze, Andreas; Hantschel, Thomas; Vandervorst, Wilfried

ISSN

0038-1101

Journal

Solid-State Electronics

Volume

71

Title

Two-dimensional carrier mapping at the nanometerscale on 32nm node targeted p-MOSFETs using high vacuum scanning spreading resistance microscopy

Publication type

Journal article