Publication:
Nano-beam diffraction investigation of the strain evolution in SiGe channel pFETs with gate first or gate last process
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1992 since deposited on 2021-10-20
1last month
Acq. date: 2026-10-10
Citations
Statistics
Views
1992 since deposited on 2021-10-20
1last month
Acq. date: 2026-10-10
Citations