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Low-temperature Ge and GeSn chemical vapor deposition using Ge2H6
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Authors
Gencarelli, Federica
;
Vincent, Benjamin
;
Souriau, Laurent
;
Richard, Olivier
;
Vandervorst, Wilfried
;
Loo, Roger
;
Caymax, Matty
;
Heyns, Marc
ISSN
0040-6090
Issue
8
Journal
Thin Solid Films
Volume
520
Title
Low-temperature Ge and GeSn chemical vapor deposition using Ge2H6
Publication type
Journal article
Embargo date
9999-12-31
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