Authors

Hikavyy, Andriy; Witters, Liesbeth; Mitard, Jerome; Vanherle, Wendy; Vandervorst, Wilfried; Dekoster, Johan; Loo, Roger; Caymax, Matty

Conference

International Silicon-Germanium Technology and Device Meeting

Title

An investigation of growth and properties of Si capping layers used in advanced SiGe/Ge based pMOS transistors

Publication type

Meeting abstract