Junction strategies for 1x nm technology node with FINFET and high mobility channel

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Authors
Horiguchi, Naoto; Zschaetzsch, Gerd; Sasaki, Yuichiro; Kambham, Ajay Kumar; Douhard, Bastien; Togo, Mitsuhiro; Hellings, Geert; Mitard, Jerome; Witters, Liesbeth; Eneman, Geert; Noda, Taiji; Collaert, Nadine; Vandervorst, Wilfried; Thean, Aaron
Conference
12th International Workshop on Junction Technology - IWJT
Title
Junction strategies for 1x nm technology node with FINFET and high mobility channel
Publication type
Proceedings paper
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