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Ultra thin hybrid floating gate and high-k dielectric as IGD enabler of highly scaled planar NAND flash technology
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Authors
Kar, Gouri Sankar
;
Breuil, Laurent
;
Blomme, Pieter
;
Hody, Hubert
;
Locorotondo, Sabrina
;
Jossart, Nico
;
Richard, Olivier
;
Bender, Hugo
;
Van den Bosch, Geert
;
Debusschere, Ingrid
;
Van Houdt, Jan
Conference
International Electron Devices Meeting - IEDM
Title
Ultra thin hybrid floating gate and high-k dielectric as IGD enabler of highly scaled planar NAND flash technology
Publication type
Proceedings paper
Embargo date
9999-12-31
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