Authors

Kesters, Els; Le, Quoc Toan; Lux, Marcel; Pittevils, Joris; Vereecke, Guy; Struyf, Herbert; De Gendt, Stefan

ISSN

0013-4651

Issue

5

Journal

Journal of the Electrochemical Society

Volume

159

Title

Towards fully aqueous ozone wet strip of 193 nm photoresist stack using UV pre-treatments in low-k patterning applications

Publication type

Journal article

Embargo date

9999-12-31