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Ultra-thin DVS-BCB adhesive bonding of III-V wafers, dies and multiple dies to a patterned silicon-on-insulator substrate
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Authors
Keyvaninia, Shahram
;
Muneeb, Muhammad
;
Stankovic, Stevan
;
van Veldhoven, P.J.
;
Van Thourhout, Dries
;
Roelkens, Gunther
ISSN
2159-3930
Issue
1
Journal
Optical Materials Express
Volume
3
Title
Ultra-thin DVS-BCB adhesive bonding of III-V wafers, dies and multiple dies to a patterned silicon-on-insulator substrate
Publication type
Journal article
Embargo date
9999-12-31
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