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Electrode process dependent NBTI chracteristics of TiN gate FinFETs
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Authors
Kim, Jinju
;
Cho, Moon Ju
;
Pantisano, Luigi
;
Chiarella, Thomas
;
Togo, Mitsuhiro
;
Horiguchi, Naoto
;
Groeseneken, Guido
;
Lee, ByoungHun
Conference
IEEE International Reliability Physics Symposium - IRPS
Title
Electrode process dependent NBTI chracteristics of TiN gate FinFETs
Publication type
Proceedings paper
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