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Effect of UV irradiation on modification and subsequent wet removal of model and post-etch fluorocarbon residues
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Authors
Le, Quoc Toan
;
de Marneffe, Jean-Francois
;
Conard, Thierry
;
Vaesen, Inge
;
Struyf, Herbert
;
Vereecke, Guy
ISSN
0013-4651
Issue
3
Journal
Journal of the Electrochemical Society
Volume
159
Title
Effect of UV irradiation on modification and subsequent wet removal of model and post-etch fluorocarbon residues
Publication type
Journal article
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