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Reduction of threading dislocation density in GaN grown on 200 mm Si (111) substrate with in-situ Si2H6 inter-treatment
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Authors
Liang, Hu
;
Carlson, Eric
;
Zhao, Ming
;
Borniquel, Jose
;
Kang, SangWang
;
Jun, Sungwon
;
Rosseel, Erik
;
L'abbe, Caroline
;
Dekoster, Johan
Conference
International Workshop on Nitride Semiconductors - IWN
Title
Reduction of threading dislocation density in GaN grown on 200 mm Si (111) substrate with in-situ Si2H6 inter-treatment
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Meeting abstract
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