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85nm-wide 1.5mA/μm-ION IFQW SiGe-pFET: raised vs embedded Si0.75Ge0.25 S/D benchmarking and in-depth hole transport study
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Authors
Mitard, Jerome
;
Witters, Liesbeth
;
Eneman, Geert
;
Hellings, Geert
;
Pantisano, Luigi
;
Hikavyy, Andriy
;
Loo, Roger
;
Eyben, Pierre
;
Horiguchi, Naoto
;
Thean, Aaron
Conference
Symposium on VLSI Technology - VLSIT
Title
85nm-wide 1.5mA/μm-ION IFQW SiGe-pFET: raised vs embedded Si0.75Ge0.25 S/D benchmarking and in-depth hole transport study
Publication type
Proceedings paper
Embargo date
9999-12-31
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