Authors

Peter, Antony; Toeller, Michael; Radu, Iuliana; Adelmann, Christoph; Schaekers, Marc; Meersschaut, Johan; Conard, Thierry; Van Elshocht, Sven

ISSN

2162-8769

Issue

4

Journal

ECS Journal of Solid State Science and Technology

Volume

1

Title

Process study and characterization of VO2 thin films synthesized by ALD using TEMAV and O3 precursors

Publication type

Journal article

Embargo date

9999-12-31