Publication:
Silicon-germanium (SiGe) technology for MEMS and NEMS fabrication
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1848 since deposited on 2021-10-20
4last month
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Acq. date: 2026-08-07
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Statistics
Views
1848 since deposited on 2021-10-20
4last month
2last week
Acq. date: 2026-08-07
Citations