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Low-frequency noise assessment of the oxide quality of gate-last high-k pMOSFETS
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Authors
Simoen, Eddy
;
Veloso, Anabela
;
Horiguchi, Naoto
;
Claeys, Cor
ISSN
0741-3106
Issue
10
Journal
IEEE Electron Device Letters
Volume
33
Title
Low-frequency noise assessment of the oxide quality of gate-last high-k pMOSFETS
Publication type
Journal article
Embargo date
9999-12-31
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