Electrically active defects at the AlN/Si(111) interface studied by DLTS and ESR

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Authors

Simoen, Eddy; Visalli, Domenica; Van Hove, Marleen; Leys, Maarten; Favia, Paola; Bender, Hugo; Borghs, Gustaaf; Nguyen, A.P.D.; Stesmans, Andre

ISSN

0031-8965

Issue

10

Journal

Physica Status Solidi A

Volume

209

Title

Electrically active defects at the AlN/Si(111) interface studied by DLTS and ESR

Publication type

Journal article

Embargo date

9999-12-31

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