Publication:
Impact of advanced patterning options, 193nm and EUV, on local interconnect performance
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1828 since deposited on 2021-10-20
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Acq. date: 2026-08-07
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Statistics
Views
1828 since deposited on 2021-10-20
2last month
2last week
Acq. date: 2026-08-07
Citations