Orientation dependence of Si1-xCx:P growth and the impact on FiNFET structures

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Authors
Tolle, John; Weeks, Doran; Bauer, Matthias; Machkaoutsan, Vladimir; Maes, Jan; Togo, Mitsuhiro; Brus, Stephan; Hikavyy, Andriy; Loo, Roger
Conference
SiGe, Ge, and Related Compunds 5: Materials, Processing, and Devices
Title
Orientation dependence of Si1-xCx:P growth and the impact on FiNFET structures
Publication type
Proceedings paper
Embargo date
9999-12-31
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