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Void detection in copper interconnects using energy dispersive X-ray spectroscopy
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Authors
Tsigkourakos, Menelaos
;
Vandervorst, Wilfried
;
Hantschel, Thomas
;
Franquet, Alexis
;
Conard, Thierry
;
Carbonell, Laure
ISSN
1071-1023
Issue
5
Journal
Journal of Vacuum Science and Technology B
Volume
30
Title
Void detection in copper interconnects using energy dispersive X-ray spectroscopy
Publication type
Journal article
Embargo date
9999-12-31
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