Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Dissertations
View item
imec Publications Repository
imec Publications
Dissertations
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Modelling and experimental evaluation of (post) lithography process contributions to pattern roughness
Metadata
Show full item record
Authors
Vaglio Pret, Alessandro
Supervisor
Van den hove, Luc
Title
Modelling and experimental evaluation of (post) lithography process contributions to pattern roughness
Publication type
PHD thesis
Collections
Dissertations
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login
NoThumbnail
![No Thumbnail [100%x80]](data:image/svg+xml;base64,PD94bWwgdmVyc2lvbj0iMS4wIiBlbmNvZGluZz0iVVRGLTgiIHN0YW5kYWxvbmU9InllcyI/PjxzdmcgeG1sbnM9Imh0dHA6Ly93d3cudzMub3JnLzIwMDAvc3ZnIiB3aWR0aD0iMTI2NCIgaGVpZ2h0PSI4MCIgdmlld0JveD0iMCAwIDEyNjQgODAiIHByZXNlcnZlQXNwZWN0UmF0aW89Im5vbmUiPjxkZWZzLz48cmVjdCB3aWR0aD0iMTI2NCIgaGVpZ2h0PSI4MCIgZmlsbD0iI0VFRUVFRSIvPjxnPjx0ZXh0IHg9IjM1Ny41IiB5PSI0MCIgc3R5bGU9ImZpbGw6I0FBQUFBQTtmb250LXdlaWdodDpib2xkO2ZvbnQtZmFtaWx5OkFyaWFsLCBIZWx2ZXRpY2EsIE9wZW4gU2Fucywgc2Fucy1zZXJpZiwgbW9ub3NwYWNlO2ZvbnQtc2l6ZTo1OXB0O2RvbWluYW50LWJhc2VsaW5lOmNlbnRyYWwiPk5vIFRodW1ibmFpbDwvdGV4dD48L2c+PC9zdmc+)
