Thermal and plasma treatments for improved (Sub-)1nm EOT RMG high-k last devices

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Authors
Veloso, Anabela; Arimura, Hiroaki; Simoen, Eddy; Paraschiv, Vasile; Shi, Xiaoping; Cho, Moon Ju; Ragnarsson, Lars-Ake; Chew, Soon Aik; Vecchio, Emma; Sebaai, Farid; Roussel, Philippe; Santos, S. D.; Schram, Tom; Higuchi, Y.; Thean, Aaron; Horiguchi, Naoto
Conference
43rd IEEE Semiconductor Interface Specialists Conference - SISC
Title
Thermal and plasma treatments for improved (Sub-)1nm EOT RMG high-k last devices
Publication type
Meeting abstract
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