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Effective work function engineering for aggressively scaled planar and FinFET-based devices with high-k last replacement metal gate technology

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1957 since deposited on 2021-10-20
4last month
3last week
Acq. date: 2026-01-11

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1957 since deposited on 2021-10-20
4last month
3last week
Acq. date: 2026-01-11

Citations