Authors

Amat, Esteve; Kauerauf, Thomas; Rodríguez, Rosana; Nafría, Montse; Aymerich, Xavier; Degraeve, Robin; Groeseneken, Guido

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

103

Title

A comprehensive study of channel hot-carrier degradation in short channel MOSFETs with high-k dielectrics

Publication type

Journal article

Embargo date

9999-12-31