Fin dimension influence on mechanical stressors in triple-gate SOI nMOSFETs

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Authors

Buhler, Rudolf; Simoen, Eddy; Agopian, Paula; Claeys, Cor; Martino, Joao

Conference

Advanced Semiconductor-on-Insulator Technology and Related Physics

Title

Fin dimension influence on mechanical stressors in triple-gate SOI nMOSFETs

Publication type

Proceedings paper

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