Authors

Caymax, Matty; Jayachandran, Suseendran; Lu, Augustin; Delabie, Annelies; Loo, Roger; Hikavyy, Andriy; Pourtois, Geoffrey; Vandervorst, Wilfried; Heyns, Marc

Conference

JSPS Core-to-Core Program Seminar on 'Atomically Controlled Processing for ULSI'

Title

Oxygen in Si epitaxial growth: from interface contamination to Si/O superlattice engineering

Publication type

Meeting abstract